Authors Juillard, Jérome, Vidal-Alvarez, Gabriel, Uranga, Arantxa, Barniol, Nuria, and Bonnoit, Alain Citation Key juillard2014novel COinS Data Pagination 1573–1576 Publisher Elsevier Journal Procedia Engineering Volume 87 Year of Publication 2014 ← Multi-cantilever Oscillator → NEMS Switches Monolithically Fabricated on CMOS MIM Capacitors