Authors E. Ledesma, N. Barniol, A. Uranga, and I. Zamora Citation Key 177 COinS Data Issue 19 Journal IEEE Sensors Journal Start Page 11128 Volume 20 Year of Publication 2020 ← Miniaturized 0.13 μm CMOS Front-End Analog for AlN PMUT Arrays → Multi-Frequency Resonance Behaviour of a Si Fractal NEMS Resonator