Research Lines:

  1. MEMS and NEMS: new devices and new properties (arrays, coupling-modes….)
  2. Integration of MEMS/NEMS resonators with CMOS using standard sub-micro-technology CMOS process (CMOS-MEMS)
  3. Development of piezoelectrical micromachined ultrasound transducers (PMUTs)

Applications:

  1. Sensors for high sensitivity mass detection (final objective, single detection molecules, attograms)
  2. Development of Sensor-System-on-Chip (SSoC) for enhanced sensing performance
  3. Resonators for RF applications (MEMS/NEMS for signal processing up to the GHz range, Fully integrated RF communications system: oscillator, filter, mixer based on CMOS-MEMS)
  4. Non-linear applications (switches, memory devices, modal coupling for enhance behavior, coupling in arrays, fundamental properties)
  5. Ultrasound imaging and fingerprint devices for portable devices
ams Al cantilever SEM image
ams Al cantilever with CMOS amplifier