Research Lines:
- MEMS and NEMS: new devices and new properties (arrays, coupling-modes….)
- Integration of MEMS/NEMS resonators with CMOS using standard sub-micro-technology CMOS process (CMOS-MEMS)
- Development of piezoelectrical micromachined ultrasound transducers (PMUTs)
Applications:
- Sensors for high sensitivity mass detection (final objective, single detection molecules, attograms)
- Development of Sensor-System-on-Chip (SSoC) for enhanced sensing performance
- Resonators for RF applications (MEMS/NEMS for signal processing up to the GHz range, Fully integrated RF communications system: oscillator, filter, mixer based on CMOS-MEMS)
- Non-linear applications (switches, memory devices, modal coupling for enhance behavior, coupling in arrays, fundamental properties)
- Ultrasound imaging and fingerprint devices for portable devices
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