Authors Munoz-Gamarra, J. L., Juillard, J., and Barniol, N. Citation Key 84866616516 COinS Data Pagination 2103–2106 Conference Name ISCAS 2012 - 2012 IEEE International Symposium on Circuits and Systems Year of Conference 2012 ← A 230 MHz CMOS-MEMS bulk acoustic wave resonator → Metal microelectromechanical oscillator exhibiting ultra-high water vapor resolution