Authors Ferrer, Eloi Marigó, Barniol, N., Uranga, A., Giner, J., and Muñoz-Gamarra, J. L. Citation Key 84865602852 COinS Data ISSN 01679317 Pagination 458–462 Journal Microelectronic Engineering Volume 98 Year of Publication 2012 ← Cross coupled beams CMOS-MEMS resonator for VHF range with enhanced electrostatic detection → Analysis of a MEMS-based ring oscillator