Authors Giner, J., Barniol, N., Gamarra, J.L. Muñoz, Marigo, E., Torres, F., and Uranga, A. Citation Key 77957865926 COinS Data Pagination 344–348 Conference Name 2010 IEEE International Frequency Control Symposium, FCS 2010 Year of Conference 2010 ← Linear operation of a 11MHz CMOS-MEMS Resonator → Characterization of CMOS-MEMS resonator by pulsed mode electrostatic actuation