- Authors
- Marigó, E., Barniol, N., Uranga, A., Torres, F., Giner, J., Vidal, G., and Muñoz-Gamarra, J. L.
- Citation Key
- 79960067817
- COinS Data
- ISSN
- 01679317
- Issue
- 8
- Pagination
- 2325–2329
- Journal
- Microelectronic Engineering
- Volume
- 88
- Year of Publication
- 2011