Citation Key 189 COinS Data Edition 20 Conference Name International Conference on Solid-State Sensors, Actuators and Microsystems & Eurosensors XXXIII Year of Conference 2019 ← FULLY INTEGRATED CMOS-PMUT TRANSCEIVER → AlN Piezoelectric Micromachined Ultrasonic Transducer Array Monolithically Fabricated on Top of Pre-Processed CMOS Substrates