Citation Key 190 COinS Data Edition 20 Conference Name International Conference on Solid-State Sensors, Actuators and Microsystems & Eurosensors XXXIII Year of Conference 2019 ← AlN Pmut with Crossed-Cavity for Better Acoustic Pressure Outputs in Liquid at High Frequency → AlN Piezoelectric Micromachined Ultrasonic Transducer with Piston-Like Shape for Liquid Environment Operation