Authors Giner, J., Barniol, N., Marigó, E., Torres, F., and Uranga, A. Citation Key 77952370023 COinS Data ISSN 00135194 Issue 9 Pagination 640–641 Journal Electronics Letters Volume 46 Year of Publication 2010 ← Optical vibrometer for mechanical properties characterization of silicalite-only cantilever based sensors → Linear operation of a 11MHz CMOS-MEMS Resonator