- Authors
- Agustí, J., N.Barniol, Santamaría, J., Pina, M., Villarroya-Gaudó, M., Sesé, J., Urbiztondo, M. A., Murillo, G., Abadal, G., and Pellejero, I.
- Citation Key
- 76949104263
- COinS Data
- ISSN
- 01679317
- Issue
- 5-8
- Pagination
- 1207–1209
- Journal
- Microelectronic Engineering
- Volume
- 87
- Year of Publication
- 2010