Authors Muñoz-Gamarra, J. L., Barniol, N., Esteve, J., Uranga, A., Giner, J., Marigó, E., and Alcaine, P. Citation Key 84874074319 COinS Data ISSN 01679317 Journal Microelectronic Engineering Year of Publication 2013 → Exploitation of non-linearities in CMOS-NEMS electrostatic resonators for mechanical memories