Authors Uranga, A., Barniol, N., Muñóz-Gamarra, J. L., Giner, J., Marigó, E., and Verd, J. Citation Key 84877357517 COinS Data ISSN 09244247 Pagination 88–95 Journal Sensors and Actuators, A: Physical Volume 197 Year of Publication 2013 ← Integration of NEMS resonators in a 65 nm CMOS technology → Packaged CMOS-MEMS free-free beam oscillator