- Authors
- Murillo, Gonzalo, Barniol, Nuria, Boisen, Anja, Noeth, Nadine, Cagliani, Alberto, Agusti, Jordi, Abadal, Gabriel, Keller, Stephan, and Davis, Zachary J.
- Citation Key
- 76949094192
- COinS Data
- ISSN
- 01679317
- Issue
- 5-8
- Pagination
- 1173–1176
- Journal
- Microelectronic Engineering
- Volume
- 87
- Year of Publication
- 2010