- Authors
- Marigó, E., Barniol, N., Esteve, J., Abadal, G., Uranga, A., Giner, J., Torres, F., Murillo, G., and Lopez, JL
- Citation Key
- 78650924295
- COinS Data
- ISSN
- 09601317
- Issue
- 6
- Journal
- Journal of Micromechanics and Microengineering
- Volume
- 20
- Year of Publication
- 2010