Citation Key 192 COinS Data Conference Name IEEE International Workshop on PiezoMEMS (IWPM), Year of Conference 2019 ← AlN Piezoelectric Micromachined Ultrasonic Transducer with Piston-Like Shape for Liquid Environment Operation → A feasibility study of AlN ultrasonic transducers fabrication using the multi-user PiezoMUMPs process for fingerprint scanning at GHz range