Citation Key 191 COinS Data Conference Name IEEE International Workshop on PiezoMEMS (IWPM), Year of Conference 2019 ← AlN Piezoelectric Micromachined Ultrasonic Transducer Array Monolithically Fabricated on Top of Pre-Processed CMOS Substrates → Performance of CMOS-Compatible Scandium Doped AlN PMUT for Imaging Applications.