- Authors
- Giner, Joan, Arcamone, Julien, Barniol, Nuria, Colinet, Eric, Muñoz-Gamarra, Jose Luis, Marigó, Eloi, and Uranga, Arantxa
- Citation Key
- 84865588481
- COinS Data
- ISSN
- 01679317
- Pagination
- 599–602
- Journal
- Microelectronic Engineering
- Volume
- 98
- Year of Publication
- 2012