Authors Marigó, E., Barniol, N., Uranga, A., Lopez, JL, and Verd, J. Citation Key 88 COinS Data Journal J Micromech. Microeng Start Page 115018 Volume 23 Year of Publication 2013 ← Exploitation of non-linearities in CMOS-NEMS electrostatic resonators for mechanical memories → Cancellation of the parasitic feedthrough current in an integrated CMOS-MEMS clamped-clamped beam resonator