Authors Giner, J., Barniol, N., Marigó, E., Muñóz-Gamarra, J. L., and Uranga, A. Citation Key 84860439533 COinS Data ISSN 09601317 Issue 5 Journal Journal of Micromechanics and Microengineering Volume 22 Year of Publication 2012 ← Cancellation of the parasitic feedthrough current in an integrated CMOS-MEMS clamped-clamped beam resonator → VHF monolithically integrated CMOS-MEMS longitudinal bulk acoustic resonator