Authors Giner, J., Barniol, N., Marigó, E., Muñoz-Gamarra, J. L., and Uranga, A. Citation Key 84860509891 COinS Data ISSN 00135194 Issue 9 Pagination 514–516 Journal Electronics Letters Volume 48 Year of Publication 2012 ← A fully integrated programmable dual-band RF filter based on electrically and mechanically coupled CMOS-MEMS resonators → Cross coupled beams CMOS-MEMS resonator for VHF range with enhanced electrostatic detection